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A chamber contains a heated silicon rod, and a mixture of high purity trichlorosilane mixed with high purity hydrogen that is passed over the rod.
A chamber contains a heated silicon rod, and a mixture of high purity trichlorosilane mixed with high purity hydrogen that is passed over the rod. Pure silicon (EGS - electronic grade silicon) deposits on the rod as a polycrystalline solid. Single crystals of silica are made later by subsequently melting the EGS and drawing a single crystal from the melt. The reaction is
H2 (g)+ SiHCl3 (g) -> Si (s) + 3 HCl (g)
the rod initially has a mass of 1460 g, and the more fraction of H2 in the exit gas is 0.223. The more fraction of H2 in the feed to the reactor is 0.580, and the feed enters at the rate of 6.22 kg moles per hour. What will be the mass of the rod at the end of the process?
