Waiting for answer This question has not been answered yet. You can hire a professional tutor to get the answer.
QUESTION
For a photoresist that can resolve MTF=0.4, if the exposure system has NA=0.75, use gline =436nm, spatial coherence S=0.5. What is the resolution
For a photoresist that can resolve MTF=0.4, if the exposure system has NA=0.75, use gline λ=436nm, spatial coherence S=0.5. What is the resolution (half pitch W)? If using iline (365nm) exposure, what is the resolution?
